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珠海市中芯集成電路有限公司
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Equipment introduction
GNX300B

lProduced by OKAMOTO, Japan

lgrinding size: 8"~12"

lLimit grinding thickness: 100um

lSpeed : 0~3600rpm

lMinimum movement: 1um

lSingle chip error: within 10um

lInter-chip error: within ±5um

DFG840

lProduced by DISCO, Japan

lgrinding size: 8"~12"

lLimit grinding thickness: 100um

lSpeed : 0~3600rpm

lMinimum movement: 1um

lSingle chip error: within 10um

lInter-chip error: within ±5um

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